Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786493 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsushi UEDA, Junichi Tanabe, Yuki TAIRA, Naofumi Ohashi, Hideharu Itatani | 2017-10-10 |