Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728431 | Method of manufacturing semiconductor device | Naofumi Ohashi, Toshiyuki Kikuchi, Shun MATSUI | 2017-08-08 |
| 9659767 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Hiroshi Ashihara, Atsushi Sano | 2017-05-23 |