Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818630 | Substrate processing apparatus | Akira Takahashi | 2017-11-14 |
| 9735068 | Method of manufacturing semiconductor device | Naofumi Ohashi, Masanori NAKAYAMA, Atsuhiko Suda, Shun MATSUI | 2017-08-15 |
| 9666494 | Method of manufacturing semiconductor device | Atsuhiko Suda, Toshiyuki Kikuchi | 2017-05-30 |