Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816182 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Hideto Tateno, Hiroshi Ashihara, Keishin Yamazaki, Takurou Ushida, Iwao Nakamura +1 more | 2017-11-14 |
| D795209 | Heater for semiconductor thermal process | Hitoshi Murata, Takashi Yahata, Takatomo Yamaguchi, Shuhei Saido | 2017-08-22 |
| D793975 | Heater for semiconductor thermal process | Hitoshi Murata, Takashi Yahata, Hidenari Yoshida, Shuhei Saido | 2017-08-08 |
| 9587313 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Hiroshi Ashihara, Hideto Tateno, Harunobu Sakuma | 2017-03-07 |