Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816182 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Yuichi Wada, Hiroshi Ashihara, Keishin Yamazaki, Takurou Ushida, Iwao Nakamura +1 more | 2017-11-14 |
| 9793112 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takuya JODA, Toru Kakuda, Masahisa Okuno | 2017-10-17 |
| D788704 | Heat insulating unit for substrate processing apparatus | Daisuke Hara | 2017-06-06 |
| D788705 | Heat insulating unit for substrate processing apparatus | Daisuke Hara | 2017-06-06 |
| D788706 | Heat insulating unit for substrate processing apparatus | Daisuke Hara | 2017-06-06 |
| D788038 | Heat insulating unit for substrate processing apparatus | Daisuke Hara | 2017-05-30 |
| 9587313 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Yuichi Wada, Hiroshi Ashihara, Harunobu Sakuma | 2017-03-07 |
| D778458 | Reaction tube | Daisuke Hara | 2017-02-07 |
| D778457 | Reaction tube | Daisuke Hara | 2017-02-07 |