Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793112 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Toru Kakuda, Masahisa Okuno, Hideto Tateno | 2017-10-17 |
| 9646862 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuyoshi Hamano, Atsushi UMEKAWA, Akinori Ishii, Masahisa Okuno | 2017-05-09 |