Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779970 | Heater supporting device | Tetsuya Kosugi, Shinobu Sugiura, Masaaki Ueno | 2017-10-03 |
| D795209 | Heater for semiconductor thermal process | Yuichi Wada, Takashi Yahata, Takatomo Yamaguchi, Shuhei Saido | 2017-08-22 |
| D793974 | Heater for semiconductor thermal process | Takatomo Yamaguchi | 2017-08-08 |
| D793975 | Heater for semiconductor thermal process | Yuichi Wada, Takashi Yahata, Hidenari Yoshida, Shuhei Saido | 2017-08-08 |
| 9695511 | Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate | Tetsuya Kosugi, Masaaki Ueno, Masashi Sugishita | 2017-07-04 |
| 9587884 | Insulation structure and method of manufacturing semiconductor device | Tetsuya Kosugi, Motoya Takewaki, Masaaki Ueno | 2017-03-07 |