Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D803075 | Thermometry tool for substrate processing apparatus | Tokunobu Akao, Motoya Takewaki, Akihiro Osaka, Masaaki Ueno, Tetsuya Kosugi | 2017-11-21 |
| 9695511 | Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate | Hitoshi Murata, Tetsuya Kosugi, Masaaki Ueno | 2017-07-04 |
| 9577276 | Fuel cell membrane electrode assembly | Naoki Mitsuta, Yukihito Tanaka, Hiroshi Sohma, Kenichi Tanaka, Masahiro Fukuta | 2017-02-21 |