Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D803075 | Thermometry tool for substrate processing apparatus | Tokunobu Akao, Akihiro Osaka, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita | 2017-11-21 |
| D790490 | Reaction tube | Akihiro Osaka, Hideto Yamaguchi | 2017-06-27 |
| D786951 | Reaction tube | Akihiro Osaka, Hideto Yamaguchi | 2017-05-16 |
| 9587884 | Insulation structure and method of manufacturing semiconductor device | Tetsuya Kosugi, Hitoshi Murata, Masaaki Ueno | 2017-03-07 |
| D778741 | Protector tube for thermocouple | Akihiro Osaka, Hideto Yamaguchi | 2017-02-14 |
| D778742 | Protector tube for thermocouple | Akihiro Osaka, Hideto Yamaguchi | 2017-02-14 |