Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D803075 | Thermometry tool for substrate processing apparatus | Tokunobu Akao, Motoya Takewaki, Akihiro Osaka, Tetsuya Kosugi, Masashi Sugishita | 2017-11-21 |
| 9779970 | Heater supporting device | Tetsuya Kosugi, Hitoshi Murata, Shinobu Sugiura | 2017-10-03 |
| 9695511 | Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate | Hitoshi Murata, Tetsuya Kosugi, Masashi Sugishita | 2017-07-04 |
| 9587884 | Insulation structure and method of manufacturing semiconductor device | Tetsuya Kosugi, Motoya Takewaki, Hitoshi Murata | 2017-03-07 |