Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779970 | Heater supporting device | Tetsuya Kosugi, Hitoshi Murata, Masaaki Ueno | 2017-10-03 |
| 9698037 | Substrate processing apparatus | Seiyo Nakashima, Yuichi Matsuda, Takashi Nogami, Tomoyuki Yamada | 2017-07-04 |