Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D803908 | Rotary tool for boat of semiconductor manufacturing apparatus | Takatomo Yamaguchi | 2017-11-28 |
| 9698037 | Substrate processing apparatus | Seiyo Nakashima, Yuichi Matsuda, Shinobu Sugiura, Tomoyuki Yamada | 2017-07-04 |