Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D803075 | Thermometry tool for substrate processing apparatus | Motoya Takewaki, Akihiro Osaka, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita | 2017-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D803075 | Thermometry tool for substrate processing apparatus | Motoya Takewaki, Akihiro Osaka, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita | 2017-11-21 |