Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2011-10-18 |
| 8022356 | Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope | Mayuka Oosaki, Chie Shishido, Hiroki Kawada | 2011-09-20 |
| 7957579 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Hiroshi Miyai +2 more | 2011-06-07 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2011-05-31 |
| 7935927 | Method and apparatus for observing a specimen | Atsushi Miyamoto, Hidetoshi Morokuma | 2011-05-03 |
| 7894658 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Hiroshi Miyai +2 more | 2011-02-22 |
| 7889908 | Method and apparatus for measuring shape of a specimen | Atsushi Miyamoto, Hidetoshi Morokuma | 2011-02-15 |