Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2011-05-31 |
| 7876113 | Method of inspecting pattern and inspecting instrument | Mitsuo Suga, Yoichiro Neo, Hidetoshi Nishiyama | 2011-01-25 |