Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982188 | Apparatus and method for wafer pattern inspection | Hisaya Murakoshi, Hideo Todokoro, Hiroshi Makino, Yoshihiro Anan | 2011-07-19 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2011-05-31 |