Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989768 | Scanning electron microscope | Akira Ikegami, Minoru Yamazaki, Hideyuki Kazumi, Koichiro Takeuchi | 2011-08-02 |
| 7982188 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hideo Todokoro, Hiroshi Makino, Yoshihiro Anan | 2011-07-19 |