Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982188 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hisaya Murakoshi, Hiroshi Makino, Yoshihiro Anan | 2011-07-19 |
| 7977632 | Scanning electron microscope | Makoto Ezumi, Yasutsugu Usami | 2011-07-12 |
| 7956324 | Charged particle beam apparatus for forming a specimen image | Noritsugu Takahashi, Muneyuki Fukuda, Mitsugu Sato | 2011-06-07 |