Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026481 | Charged particle apparatus, scanning electron microscope, and sample inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Atsuko Fukada | 2011-09-27 |
| 7956324 | Charged particle beam apparatus for forming a specimen image | Muneyuki Fukuda, Hideo Todokoro, Mitsugu Sato | 2011-06-07 |