Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030614 | Charged particle beam apparatus and dimension measuring method | Katsuhiko Sakai, Atsushi Takane, Yoshihiko Nakayama | 2011-10-04 |
| 8026491 | Charged particle beam apparatus and method for charged particle beam adjustment | Takeshi Ogashiwa, Atsushi Takane, Toshihide Agemura, Yuusuke Narita, Takeharu Shichiji +3 more | 2011-09-27 |
| 7973282 | Charged particle beam apparatus and dimension measuring method | Katsuhiko Sakai, Atsushi Takane, Yoshihiko Nakayama | 2011-07-05 |
| 7964845 | Charged particle beam device | Yuusuke Tanba, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto +1 more | 2011-06-21 |
| 7956324 | Charged particle beam apparatus for forming a specimen image | Noritsugu Takahashi, Muneyuki Fukuda, Hideo Todokoro | 2011-06-07 |
| 7928377 | Charged particle beam apparatus and sample manufacturing method | Tohru Ishitani, Tsuyoshi Ohnishi, Koichiro Takeuchi | 2011-04-19 |
| 7923701 | Charged particle beam equipment | Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Atsushi Takane +1 more | 2011-04-12 |
| 7888640 | Scanning electron microscope and method of imaging an object by using the scanning electron microscope | Ichiro Tachibana, Naomasa Suzuki | 2011-02-15 |
| 7875849 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2011-01-25 |