Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7888640 | Scanning electron microscope and method of imaging an object by using the scanning electron microscope | Mitsugu Sato, Naomasa Suzuki | 2011-02-15 |
| 7875849 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki | 2011-01-25 |