Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026481 | Charged particle apparatus, scanning electron microscope, and sample inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Noritsugu Takahashi | 2011-09-27 |
| 7875849 | Electron beam apparatus and electron beam inspection method | Muneyuki Fukuda, Tomoyasu Shojo, Mitsugu Sato, Naomasa Suzuki, Ichiro Tachibana | 2011-01-25 |