Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8041104 | Pattern matching apparatus and scanning electron microscope using the same | Yasutaka Toyoda, Mitsuji Ikeda | 2011-10-18 |
| 8030614 | Charged particle beam apparatus and dimension measuring method | Mitsugu Sato, Katsuhiko Sakai, Yoshihiko Nakayama | 2011-10-04 |
| 8026491 | Charged particle beam apparatus and method for charged particle beam adjustment | Takeshi Ogashiwa, Mitsugu Sato, Toshihide Agemura, Yuusuke Narita, Takeharu Shichiji +3 more | 2011-09-27 |
| 7973282 | Charged particle beam apparatus and dimension measuring method | Mitsugu Sato, Katsuhiko Sakai, Yoshihiko Nakayama | 2011-07-05 |
| 7923701 | Charged particle beam equipment | Hiromi Inada, Hiroyuki Tanaka, Shun-ichi Watanabe, Shigeto Isakozawa, Mitsugu Sato +1 more | 2011-04-12 |