Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030614 | Charged particle beam apparatus and dimension measuring method | Mitsugu Sato, Atsushi Takane, Yoshihiko Nakayama | 2011-10-04 |
| 7973282 | Charged particle beam apparatus and dimension measuring method | Mitsugu Sato, Atsushi Takane, Yoshihiko Nakayama | 2011-07-05 |