Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077962 | Pattern generating apparatus and pattern shape evaluating apparatus | Hideo Sakai, Ryoichi Matsuoka | 2011-12-13 |
| 8041104 | Pattern matching apparatus and scanning electron microscope using the same | Mitsuji Ikeda, Atsushi Takane | 2011-10-18 |
| 7991218 | Pattern matching apparatus and semiconductor inspection system using the same | Takumichi Sutani, Ryoichi Matsuoka | 2011-08-02 |
| 7978904 | Pattern inspection apparatus and semiconductor inspection system | Takumichi Sutani, Ryoichi Matsuoka, Hidemitsu Naya | 2011-07-12 |
| 7923703 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Akiyuki Sugiyama, Ryoichi Matsuoka, Takumichi Sutani | 2011-04-12 |
| 7925076 | Inspection apparatus using template matching method using similarity distribution | Yuichi Abe, Mitsuji Ikeda, Yoshimichi Satou | 2011-04-12 |