Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7978904 | Pattern inspection apparatus and semiconductor inspection system | Yasutaka Toyoda, Takumichi Sutani, Ryoichi Matsuoka | 2011-07-12 |
| 7916926 | Semiconductor inspection apparatus | Takuya Shirato, Akira Karakama | 2011-03-29 |