Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045789 | Method and apparatus for inspecting defect of pattern formed on semiconductor device | Tomofumi Nishiura, Atsushi Miyamoto, Chie Shishido | 2011-10-25 |
| 8019161 | Method, device and computer program of length measurement | Hidetoshi Morokuma, Ryoichi Matsuoka, Hitoshi Komuro, Akiyuki Sugiyama | 2011-09-13 |
| 7991218 | Pattern matching apparatus and semiconductor inspection system using the same | Yasutaka Toyoda, Ryoichi Matsuoka | 2011-08-02 |
| 7978904 | Pattern inspection apparatus and semiconductor inspection system | Yasutaka Toyoda, Ryoichi Matsuoka, Hidemitsu Naya | 2011-07-12 |
| 7925095 | Pattern matching method and computer program for executing pattern matching | Akiyuki Sugiyama, Hiroyuki Shindo, Hitoshi Komuro, Hidetoshi Morokuma | 2011-04-12 |
| 7923703 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Akiyuki Sugiyama, Ryoichi Matsuoka, Yasutaka Toyoda | 2011-04-12 |
| 7889909 | Pattern matching method and pattern matching program | Hiroyuki Shindo, Akiyuki Sugiyama, Hidetoshi Morokuma, Hitoshi Komuro | 2011-02-15 |