Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045789 | Method and apparatus for inspecting defect of pattern formed on semiconductor device | Tomofumi Nishiura, Atsushi Miyamoto, Takumichi Sutani | 2011-10-25 |
| 8022356 | Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope | Mayuka Oosaki, Maki Tanaka, Hiroki Kawada | 2011-09-20 |
| 8003940 | Tool-to-tool matching control method and its system for scanning electron microscope | Mayuka Oosaki, Hiroki Kawada, Tatsuya Maeda | 2011-08-23 |
| 7957579 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2011-06-07 |
| 7916929 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Yuji Takagi +2 more | 2011-03-29 |
| 7894658 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2011-02-22 |