Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8086022 | Electron beam inspection system and an image generation method for an electron beam inspection system | Yusuke Ominami, Yasuhiro Gunji | 2011-12-27 |
| 8086021 | Appearance inspection apparatus with scanning electron microscope and image data processing method using scanning electron microscope | Yusuke Ominami, Yasuhiro Gunji | 2011-12-27 |
| 8036447 | Inspection apparatus for inspecting patterns of a substrate | Koichi Hayakawa, Masaaki Nojiri, Michio Nakano, Takako Fujisawa, Dai Fujii | 2011-10-11 |
| 7999565 | Inspection apparatus and inspection method using electron beam | Yasuhiro Gunji, Shigeya Tanaka | 2011-08-16 |
| 7995833 | Method of alignment for efficient defect review | Takehiko Konno | 2011-08-09 |
| 7957579 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka +2 more | 2011-06-07 |
| 7894658 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka +2 more | 2011-02-22 |
| 7872219 | Illumination device with plural color light sources and first and second integrators | Yusaku Shimaoka, Atsushi Hatakeyama, Yoshimasa Fushimi | 2011-01-18 |