Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999565 | Inspection apparatus and inspection method using electron beam | Yasuhiro Gunji, Hiroshi Miyai | 2011-08-16 |
| 7889911 | Image processing unit for wafer inspection tool | Michio Nakano, Yoshiyuki Momiyama, Takashi Hiroi, Kazuya Hayashi, Dai Fujii +3 more | 2011-02-15 |