Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7957579 | Pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2011-06-07 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2011-05-31 |
| 7894658 | Pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai +2 more | 2011-02-22 |
| 7889911 | Image processing unit for wafer inspection tool | Michio Nakano, Shigeya Tanaka, Yoshiyuki Momiyama, Kazuya Hayashi, Dai Fujii +3 more | 2011-02-15 |