Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008622 | Electron beam apparatus and method of generating an electron beam irradiation pattern | Ryo Fujita, Haruo Yoda, Yuji Inoue, Masato Muraki | 2011-08-30 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2011-05-31 |