Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008622 | Electron beam apparatus and method of generating an electron beam irradiation pattern | Ryo Fujita, Kimiaki Ando, Yuji Inoue, Masato Muraki | 2011-08-30 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2011-05-31 |
| 7915582 | Method for estimation of probe shape in charged particle beam instruments | Kotoko Hirose, Takeshi Kawasaki, Tomonori Nakano | 2011-03-29 |