Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8086021 | Appearance inspection apparatus with scanning electron microscope and image data processing method using scanning electron microscope | Yusuke Ominami, Hiroshi Miyai | 2011-12-27 |
| 8086022 | Electron beam inspection system and an image generation method for an electron beam inspection system | Hiroshi Miyai, Yusuke Ominami | 2011-12-27 |
| 7999565 | Inspection apparatus and inspection method using electron beam | Hiroshi Miyai, Shigeya Tanaka | 2011-08-16 |