Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8086021 | Appearance inspection apparatus with scanning electron microscope and image data processing method using scanning electron microscope | Hiroshi Miyai, Yasuhiro Gunji | 2011-12-27 |
| 8086022 | Electron beam inspection system and an image generation method for an electron beam inspection system | Hiroshi Miyai, Yasuhiro Gunji | 2011-12-27 |