Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8036447 | Inspection apparatus for inspecting patterns of a substrate | Koichi Hayakawa, Hiroshi Miyai, Masaaki Nojiri, Michio Nakano, Dai Fujii | 2011-10-11 |
| 7889911 | Image processing unit for wafer inspection tool | Michio Nakano, Shigeya Tanaka, Yoshiyuki Momiyama, Takashi Hiroi, Kazuya Hayashi +3 more | 2011-02-15 |