Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8036447 | Inspection apparatus for inspecting patterns of a substrate | Koichi Hayakawa, Hiroshi Miyai, Michio Nakano, Takako Fujisawa, Dai Fujii | 2011-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8036447 | Inspection apparatus for inspecting patterns of a substrate | Koichi Hayakawa, Hiroshi Miyai, Michio Nakano, Takako Fujisawa, Dai Fujii | 2011-10-11 |