Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8073242 | SEM system and a method for producing a recipe | Tomofumi Nishiura, Ryoichi Matsuoka, Hidetoshi Morokuma | 2011-12-06 |
| 8045789 | Method and apparatus for inspecting defect of pattern formed on semiconductor device | Tomofumi Nishiura, Chie Shishido, Takumichi Sutani | 2011-10-25 |
| 7935927 | Method and apparatus for observing a specimen | Maki Tanaka, Hidetoshi Morokuma | 2011-05-03 |
| 7930067 | Motion editing apparatus and motion editing method for robot, computer program and robot apparatus | Tomohisa Moridaira | 2011-04-19 |
| 7897325 | Lithographic rinse solution and method for forming patterned resist layer using the same | Yoshihiro Sawada, Jun Koshiyama, Kazumasa Wakiya, Hidekazu Tajima | 2011-03-01 |
| 7889908 | Method and apparatus for measuring shape of a specimen | Maki Tanaka, Hidetoshi Morokuma | 2011-02-15 |
| 7888638 | Method and apparatus for measuring dimension of circuit pattern formed on substrate by using scanning electron microscope | Tomofumi Nishiura | 2011-02-15 |
| 7873205 | Apparatus and method for classifying defects using multiple classification modules | Hirohito Okuda, Yuji Takagi, Toshifumi Honda, Takehiro Hirai | 2011-01-18 |