Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077962 | Pattern generating apparatus and pattern shape evaluating apparatus | Yasutaka Toyoda, Hideo Sakai | 2011-12-13 |
| 8073242 | SEM system and a method for producing a recipe | Atsushi Miyamoto, Tomofumi Nishiura, Hidetoshi Morokuma | 2011-12-06 |
| 8019161 | Method, device and computer program of length measurement | Hidetoshi Morokuma, Takumichi Sutani, Hitoshi Komuro, Akiyuki Sugiyama | 2011-09-13 |
| 7991218 | Pattern matching apparatus and semiconductor inspection system using the same | Yasutaka Toyoda, Takumichi Sutani | 2011-08-02 |
| 7978904 | Pattern inspection apparatus and semiconductor inspection system | Yasutaka Toyoda, Takumichi Sutani, Hidemitsu Naya | 2011-07-12 |
| 7923703 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Hidetoshi Morokuma, Akiyuki Sugiyama, Takumichi Sutani, Yasutaka Toyoda | 2011-04-12 |