Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8073242 | SEM system and a method for producing a recipe | Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma | 2011-12-06 |
| 8045789 | Method and apparatus for inspecting defect of pattern formed on semiconductor device | Atsushi Miyamoto, Chie Shishido, Takumichi Sutani | 2011-10-25 |
| 7888638 | Method and apparatus for measuring dimension of circuit pattern formed on substrate by using scanning electron microscope | Atsushi Miyamoto | 2011-02-15 |