Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022356 | Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope | Chie Shishido, Maki Tanaka, Hiroki Kawada | 2011-09-20 |
| 8003940 | Tool-to-tool matching control method and its system for scanning electron microscope | Chie Shishido, Hiroki Kawada, Tatsuya Maeda | 2011-08-23 |