Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977632 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi | 2011-07-12 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2011-05-31 |