Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080789 | Sample dimension measuring method and scanning electron microscope | Osamu Nasu, Tadashi Otaka, Hiroki Kawada, Ritsuo Fukaya | 2011-12-20 |
| 8067733 | Scanning electron microscope having a monochromator | Wataru MORI, Yoichi Ose | 2011-11-29 |
| 7977632 | Scanning electron microscope | Hideo Todokoro, Yasutsugu Usami | 2011-07-12 |
| 7960696 | Method for inspecting and measuring sample and scanning electron microscope | Satoru Iwama, Junichi Kakuta, Takahiro Sato, Akira Ikegami | 2011-06-14 |
| 7935925 | Charged particle beam scanning method and charged particle beam apparatus | Yuko Sasaki, Makoto Nishihara, Tsutomu Kawai, Toshiaki Yanokura | 2011-05-03 |