TY

Toshiaki Yanokura

HH Hitachi High-Technologies: 1 patents #207 of 523Top 40%
Overall (2011): #140,217 of 364,097Top 40%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7935925 Charged particle beam scanning method and charged particle beam apparatus Yuko Sasaki, Makoto Ezumi, Makoto Nishihara, Tsutomu Kawai 2011-05-03