Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982188 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hisaya Murakoshi, Hideo Todokoro, Hiroshi Makino | 2011-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982188 | Apparatus and method for wafer pattern inspection | Hiroyuki Shinada, Hisaya Murakoshi, Hideo Todokoro, Hiroshi Makino | 2011-07-19 |