Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072597 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Kenji Watanabe, Tetsuya Watanabe +1 more | 2011-12-06 |
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2011-10-18 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu +2 more | 2011-09-06 |
| 7973920 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano +1 more | 2011-07-05 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2011-05-31 |
| 7952699 | Apparatus of inspecting defect in semiconductor and method of the same | Shunji Maeda, Hisae Shibuya | 2011-05-31 |
| 7940385 | Defect inspection apparatus and its method | Hisae Shibuya, Shunji Maeda | 2011-05-10 |
| 7912276 | Method and apparatus for detecting pattern defects | Hisae Shibuya, Yuji Takagi | 2011-03-22 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2011-03-08 |