Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8013989 | Defects inspecting apparatus and defects inspecting method | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2011-09-06 |
| 7973920 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano +1 more | 2011-07-05 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Taketo Ueno, Hiroyuki Nakano +5 more | 2011-05-31 |
| 7911601 | Apparatus and method for inspecting pattern | Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda, Atsushi Shimoda | 2011-03-22 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu | 2011-03-08 |