Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064066 | Method and apparatus for measuring displacement of a sample to be inspected using an interference light | Masahiro Watanabe, Shuichi Baba, Yasuhiro Yoshitake, Mineo Nomoto | 2011-11-22 |
| 8011230 | Scanning probe microscope | Masahiro Watanabe, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto, Shuichi Baba +2 more | 2011-09-06 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu +2 more | 2011-09-06 |
| 7966867 | Scanning probe microscope | Masahiro Watanabe, Shuichi Baba | 2011-06-28 |
| 7911601 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Shunzi Maeda, Atsushi Shimoda | 2011-03-22 |