Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064066 | Method and apparatus for measuring displacement of a sample to be inspected using an interference light | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba, Yasuhiro Yoshitake | 2011-11-22 |