Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064066 | Method and apparatus for measuring displacement of a sample to be inspected using an interference light | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba, Mineo Nomoto | 2011-11-22 |
| 8045146 | Method and apparatus for reviewing defect | Keiya Saito, Shunichi Matsumoto, Hidetoshi Nishiyama | 2011-10-25 |
| 7894029 | Apparatus for optically arranging surface of alignment film and method for manufacturing liquid crystal display device using the same | Takeshi Arai, Shigeru Matsuyama | 2011-02-22 |
| 7881520 | Defect inspection system | Taketo Ueno | 2011-02-01 |